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| Place of Origin: | China |
| Brand Name: | TYHJ |
| Certification: | ISO Certificate |
| Model Number: | industrial gas CF4 |
| Minimum Order Quantity: | 10pcs |
|---|---|
| Price: | negotiable |
| Packaging Details: | 1. 40L seamless steel cylinder is filled with 30kg carbon tetrafluoride CF4, and one 20' container can load 240 cylinders 2. 50L seamless steel cylinder is filled with 37.5kg carbon tetrafluoride CF4, and one 20' container can load 200 cylinders 3. Depen |
| Delivery Time: | 15-30 working days after receipt of deposit |
| Payment Terms: | T/T, L/C, D/A, D/P, Western Union |
| Supply Ability: | 100000 KG per month |
| CAS No.: | 75-73-0 | EINECS No.: | 200-896-5 |
|---|---|---|---|
| UN No.: | UN1982 | Purity: | 99.999% |
| Dot Class: | 2.3 | Appearance: | Colorless |
| High Light: | industrial gas safety,universal industrial gases |
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CAS 75-73-0 Carbon Tetrafluoride CF4 Gas For Electronics Microfabrication
Specifications
CAS No.: 75-73-0
EINECS No.: 200-896-5
UN No.: UN1982
Purity: 99.999%
Dot Class: 2.2
Appearance: Colorless
Grade Standard: Industrial Grade
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Specification |
99.999% |
|
Oxygen+Argon |
≤1ppm |
|
Nitrogen |
≤4 ppm |
|
Moisture(H2O) |
≤3 ppm |
|
HF |
≤0.1 ppm |
|
CO |
≤0.1 ppm |
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CO2 |
≤1 ppm |
|
SF6 |
≤1 ppm |
|
Halocarbynes |
≤1 ppm |
|
Total Impurities |
≤10 ppm |
Typical Application
Etching:
It is used in electronics microfabrication alone or in combination with oxygen as a plasma etchant for silicon, silicon dioxide, and silicon nitride.
Packaging & Shipping
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Package Size |
40Ltr Cylinder |
50Ltr Cylinder |
T75 ISO Tank |
|
Filling Net Weight/Cyl |
30Kgs |
37.5Kgs |
/ |
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QTY Loaded in 20’Container |
240 Cyls |
200 Cyls |
|
|
Total Net Weight |
7.2 Tons |
7.5 Tons |
|
|
Cylinder Tare Weight |
52Kgs |
55Kgs |
|
|
Valve |
CGA 580 / CGA 320 |
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Contact Person: Millet
