Place of Origin: | China |
Brand Name: | TYHJ |
Certification: | ISO Certificate |
Model Number: | NF3 |
Minimum Order Quantity: | 200pcs |
---|---|
Price: | negotiable |
Packaging Details: | 1. 44Ltr Cylinder filling with 20Kg NF3 Liquid. 2. 440L cylinder filling with 200Kg NF3 Liquid. |
Delivery Time: | 15-30 working days after receipt of deposit |
Payment Terms: | L/C, T/T, D/A, D/P, Western Union |
Supply Ability: | 10000KG per month |
CAS No.: | 7783-54-2 | EINECS No.: | 232-007-1 |
---|---|---|---|
UN No.: | UN2451 | Purity: | 99.995% |
Dot Class: | 2.2 | Appearance: | Colorless |
High Light: | advanced specialty gases,purity plus specialty gases |
Nitrogen Trifluoride NF3 Gas , Specialty Gases For Plasma Etching Of Silicon Wafers Colorless
Nitrogen trifluoride is the inorganic compound with the formula NF3. This nitrogen-fluorine compound is a colorless, odorless, nonflammable gas. It finds increasing use as an etchant in microelectronics. Nitrogen trifluoride is an extremely strong greenhouse gas.
Specifications
CAS No.: 7783-54-2
EINECS No.: 232-007-1
UN No.: UN2451
Purity: 99.995%
Dot Class: 2.2
Appearance: Colorless
Grade Standard: Electron Grade
Specification | ≥99.995% |
CF4 | ≤40 ppm |
N2 | ≤5 ppm |
O2+Ar | ≤5 ppm |
CO | ≤5 ppm |
CO2 | / |
N2O | / |
SF6 | ≤2 ppm |
H2O | ≤1 ppm |
HF | ≤1 ppm |
Typical Application
Etching:
Nitrogen Trifluoride is used in the plasma etching of silicon wafers.
Packaging & Shipping
Package Size | 44Ltr Cylinder | 440Ltr Cylinder | ISO Tank |
Filling Net Weight/Cyl | 20Kgs | 200Kgs | / |
QTY Loaded in 20’Container | 200 Cyls | 20 Cyls | |
Total Net Weight | 4 Tons | 4 Tons | |
Cylinder Tare Weight | 50Kgs | 240Kgs | |
Valve | CGA/DISS640 |
Contact Person: Millet