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Nitrogen Trifluoride NF3 Gas , Specialty Gases For Plasma Etching Of Silicon Wafers Colorless

Nitrogen Trifluoride NF3 Gas , Specialty Gases For Plasma Etching Of Silicon Wafers Colorless

    • Nitrogen Trifluoride NF3 Gas , Specialty Gases For Plasma Etching Of Silicon Wafers Colorless
    • Nitrogen Trifluoride NF3 Gas , Specialty Gases For Plasma Etching Of Silicon Wafers Colorless
  • Nitrogen Trifluoride NF3 Gas , Specialty Gases For Plasma Etching Of Silicon Wafers Colorless

    Product Details:

    Place of Origin: China
    Brand Name: TYHJ
    Certification: ISO Certificate
    Model Number: NF3

    Payment & Shipping Terms:

    Minimum Order Quantity: 200pcs
    Price: negotiable
    Packaging Details: 1. 44Ltr Cylinder filling with 20Kg NF3 Liquid. 2. 440L cylinder filling with 200Kg NF3 Liquid.
    Delivery Time: 15-30 working days after receipt of deposit
    Payment Terms: L/C, T/T, D/A, D/P, Western Union
    Supply Ability: 10000KG per month
    Contact Now
    Detailed Product Description
    CAS No.: 7783-54-2 EINECS No.: 232-007-1
    UN No.: UN2451 Purity: 99.995%
    Dot Class: 2.2 Appearance: Colorless
    High Light:

    advanced specialty gases

    ,

    purity plus specialty gases

     

    Nitrogen Trifluoride NF3 Gas , Specialty Gases For Plasma Etching Of Silicon Wafers Colorless

     

     

    Nitrogen trifluoride is the inorganic compound with the formula NF3. This nitrogen-fluorine compound is a colorless, odorless, nonflammable gas. It finds increasing use as an etchant in microelectronics. Nitrogen trifluoride is an extremely strong greenhouse gas.

     

     

     

     

    Specifications

     

     

    CAS No.: 7783-54-2

    EINECS No.: 232-007-1

    UN No.: UN2451

    Purity: 99.995%

    Dot Class: 2.2

    Appearance: Colorless

    Grade Standard: Electron Grade

    Specification ≥99.995%
    CF4 ≤40 ppm
    N2 ≤5 ppm
    O2+Ar ≤5 ppm
    CO ≤5 ppm
    CO2 /
    N2O /
    SF6 ≤2 ppm
    H2O ≤1 ppm
    HF ≤1 ppm

     

     

     

     

    Typical Application

     

     

    Etching:

     

    Nitrogen Trifluoride is used in the plasma etching of silicon wafers.

    Nitrogen Trifluoride NF3 Gas , Specialty Gases For Plasma Etching Of Silicon Wafers Colorless 0 NF3

     


     

    Packaging & Shipping

     

     

    Package Size 44Ltr Cylinder 440Ltr Cylinder ISO Tank
    Filling Net Weight/Cyl 20Kgs 200Kgs /
    QTY Loaded in 20’Container 200 Cyls 20 Cyls
    Total Net Weight 4 Tons 4 Tons
    Cylinder Tare Weight 50Kgs 240Kgs
    Valve CGA/DISS640
     
     
    Nitrogen Trifluoride(NF3)_MSDS.pdf

     

    Contact Details
    Chengdu Taiyu Industrial Gases Co., Ltd

    Contact Person: Millet

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