Place of Origin: | China |
Brand Name: | TYHJ |
Certification: | ISO Certificate |
Model Number: | electron gas PH3 |
Minimum Order Quantity: | 200pcs |
---|---|
Price: | negotiable |
Packaging Details: | 44Ltr CylinderLtr Cylinder filling 15kg and one 20'GP loaded 200 cyls |
Delivery Time: | 15-30 working days after receipt of deposit |
Payment Terms: | T/T, L/C, D/A, D/P, Western Union |
Supply Ability: | 10000 KG per month |
CAS No.: | 7803-51-2 | EINECS No.: | 232-260-8 |
---|---|---|---|
UN No.: | UN2199 | Purity: | 99.9999% |
Dot Class: | 2.3+2.1 | Appearance: | Colorless, Highly Toxic, And Flammable |
High Light: | electric gas,electronics gas |
Electron Grade Phosphine PH3 Electronic Gas For Microelectronics
Specifications
CAS No.:7803-51-2
EINECS No.: 232-260-8
UN No.: UN2199
Purity: 99.9999%
Dot Class: 2.3+2.1
Appearance: Colorless, Highly toxic, and Flammable
Grade Standard: Electron Grade
Specification |
Certified Concentration |
Unit |
Analytical Method |
|
Phosphine(PH3) |
≥99.9999 |
≥99.9999 |
% |
GC/PDID |
Nitrogen(N2) |
≤0.1 |
<0.06 |
ppmv |
GC/PDID |
Methane(CH4) |
≤0.1 |
<0.03 |
ppmv |
GC/PDID |
Oxygen(O2) |
≤0.1 |
<0.01 |
ppmv |
GC/PDID |
Argon(Ar) |
≤0.1 |
<0.01 |
ppmv |
GC/PDID |
Silane(SiH4) |
≤0.05 |
<0.01 |
ppmv |
GC/PDID |
Carbon Dioxide(CO2) |
≤0.1 |
<0.01 |
ppmv |
GC/PDID |
Carbon Monoxide(CO) |
≤0.05 |
<0.01 |
ppmv |
GC/PDID |
Hydrogen Sulfide (H2S) |
≤0.05 |
<0.02 |
ppmv |
GC/PDID |
Arsine(AsH3) |
≤0.05 |
<0.02 |
ppmv |
GC/PDID |
Ethane(C2H6) |
≤0.1 |
<0.04 |
ppmv |
GC/PDID |
Moisture (H2O) |
≤0.1 |
<0.02 |
ppmv |
Cavity Ring- down spectroscopy |
Typical Application
Microelectronics:
Small amounts of phosphine are used as a dopant in the semiconductor industry, and a precursor for the deposition of compound semiconductors.
Packaging & Shipping
Package size |
44Ltr Cylinder |
Filling net weight/cyl |
15Kgs |
QTY Loaded in 20’Container |
200 Cyls |
Total Net Weight |
3 Tons |
Cylinder Tare Weight |
50Kgs |
Contact Person: Millet