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| Place of Origin: | China |
| Brand Name: | TYHJ |
| Certification: | ISO Certificate |
| Model Number: | electronic gas NF3 |
| Minimum Order Quantity: | 200pcs |
|---|---|
| Price: | negotiable |
| Packaging Details: | 1. 44Ltr Cylinder filling with 20Kg NF3 Liquid. 2. 440L cylinder filling with 200Kg NF3 Liquid. |
| Delivery Time: | 15-30 working days after receipt of deposit |
| Payment Terms: | T/T, L/C, D/A, D/P, Western Union |
| Supply Ability: | 10000KG per month |
| CAS No.: | 7783-54-2 | EINECS No.: | 232-007-1 |
|---|---|---|---|
| UN No.: | UN2451 | Purity: | 99.995% |
| Dot Class: | 2.2 | Appearance: | Colorless |
| High Light: | semiconductor gas,electronics gas |
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Electronic Gases Nitrogen Trifluoride NF3 Gas
Nitrogen trifluoride is the inorganic compound with the formula NF3. This nitrogen-fluorine compound is a colorless, odorless, nonflammable gas. It finds increasing use as an etchant in microelectronics. Nitrogen trifluoride is an extremely strong greenhouse gas.
Specifications
CAS No.: 7783-54-2
EINECS No.: 232-007-1
UN No.: UN2451
Purity: 99.995%
Dot Class: 2.2
Appearance: Colorless
Grade Standard: Electron Grade
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Specification |
≥99.995% |
|
CF4 |
≤40 ppm |
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N2 |
≤5 ppm |
|
O2+Ar |
≤5 ppm |
|
CO |
≤5 ppm |
|
CO2 |
/ |
|
N2O |
/ |
|
SF6 |
≤2 ppm |
|
H2O |
≤1 ppm |
|
HF |
≤1 ppm |
Typical Application
Etching:
Nitrogen Trifluoride is used in the plasma etching of silicon wafers.
Packaging & Shipping
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Package Size |
44Ltr Cylinder |
440Ltr Cylinder |
ISO Tank |
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Filling Net Weight/Cyl |
20Kgs |
200Kgs |
/ |
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QTY Loaded in 20’Container |
200 Cyls |
20 Cyls |
|
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Total Net Weight |
4 Tons |
4 Tons |
|
|
Cylinder Tare Weight |
50Kgs |
240Kgs |
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Valve |
CGA/DISS640 |
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Contact Person: Millet
