Place of Origin: | China |
Brand Name: | TYHJ |
Certification: | ISO Certificate |
Model Number: | electronic gas BCL3 |
Minimum Order Quantity: | 200pcs |
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Price: | negotiable |
Packaging Details: | 1. 40Ltr Cylinder filling with 25Kg BCL3. 2. 47L cylinder filling with 50Kg BCL3. |
Delivery Time: | 15-30 working days after receipt of deposit |
Payment Terms: | T/T, L/C, D/A, D/P, Western Union |
Supply Ability: | 10000KG per month |
CAS No.: | 10294-35-1 | EINECS No.: | 233-658-4 |
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UN No.: | UN1741 | Purity: | 99.999% |
Dot Class: | 2.3 | Appearance: | Colorless, Corrosive, Liquefied Gas |
High Light: | electric gas,electronics gas |
Electronic Grade Boron Trichloride BCL3 Used In Semiconductor Manufacturing Plasma Etching
Specifications
CAS No.: 10294-35-1
EINECS No.: 233-658-4
UN No.: UN1741
Purity: 99.999%
Dot Class: 2.3
Appearance: Colorless, corrosive, liquefied gas
Grade Standard: Electronic Grade
Specification | 99.999% |
CO2 | <2 ppm |
CO | <0.5 ppm |
Chlorine | <1 ppm |
Nitrogen | <4 ppm |
Oxygen | <1 ppm |
THC | <0.5 ppm |
Typical Application
Etching:
BCl3 is also used in plasma etching in semiconductor manufacturing. This gas etches metal oxides by formation of a volatile BOClx compounds.
Packaging & Shipping
Package Size | 40Ltr Cylinder | 47Ltr Cylinder | ISO TANK |
Filling Content/Cyl | 25Kgs | 50Kgs | / |
QTY Loaded in 20’Container | 240 Cyls | 200 Cyls | |
Total Volume | 6Tons | 10Tons | |
Cylinder Tare Weight | 50Kgs | 55Kgs | |
Valve | DISS-634/CGA 660 |
Contact Person: Millet