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CAS 10294-35-1 Boron Trichloride BCL3 Gas For Semiconductor Manufacturing Plasma Etching

CAS 10294-35-1 Boron Trichloride BCL3 Gas For Semiconductor Manufacturing Plasma Etching

    • CAS 10294-35-1 Boron Trichloride BCL3 Gas For Semiconductor Manufacturing Plasma Etching
    • CAS 10294-35-1 Boron Trichloride BCL3 Gas For Semiconductor Manufacturing Plasma Etching
  • CAS 10294-35-1 Boron Trichloride BCL3 Gas For Semiconductor Manufacturing Plasma Etching

    Product Details:

    Place of Origin: China
    Brand Name: TYHJ
    Certification: ISO Certificate
    Model Number: electronic gas BCL3

    Payment & Shipping Terms:

    Minimum Order Quantity: 200pcs
    Price: negotiable
    Packaging Details: 1. 40Ltr Cylinder filling with 25Kg BCL3. 2. 47L cylinder filling with 50Kg BCL3.
    Delivery Time: 15-30 working days after receipt of deposit
    Payment Terms: T/T, L/C, D/A, D/P, Western Union
    Supply Ability: 10000KG per month
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    Detailed Product Description
    CAS No.: 10294-35-1 EINECS No.: 233-658-4
    UN No.: UN1741 Purity: 99.999%
    Dot Class: 2.3 Appearance: Colorless, Corrosive, Liquefied Gas
    High Light:

    electric gas

    ,

    electronics gas

    Electronic Grade Boron Trichloride BCL3 Used In Semiconductor Manufacturing Plasma Etching 

     

     

     

    Specifications

     

    CAS No.: 10294-35-1

    EINECS No.: 233-658-4

    UN No.: UN1741

    Purity: 99.999%

    Dot Class: 2.3

    Appearance: Colorless, corrosive, liquefied gas

    Grade Standard: Electronic Grade

    Specification 99.999%
    CO2 <2 ppm
    CO <0.5 ppm
    Chlorine <1 ppm
    Nitrogen <4 ppm
    Oxygen <1 ppm
    THC <0.5 ppm

     

     

     

    Typical Application

     

    Etching:

     

    BCl3 is also used in plasma etching in semiconductor manufacturing. This gas etches metal oxides by formation of a volatile BOClx compounds.

    BCL3 BCL3

     

     

     

    Packaging & Shipping

     

    Package Size 40Ltr Cylinder 47Ltr Cylinder ISO TANK
    Filling Content/Cyl 25Kgs 50Kgs /
    QTY Loaded in 20’Container 240 Cyls 200 Cyls
    Total Volume 6Tons 10Tons
    Cylinder Tare Weight 50Kgs 55Kgs
    Valve DISS-634/CGA 660
     
     
     
    Boron Trichloride(BCl3)_MSDS.pdf

    Contact Details
    Chengdu Taiyu Industrial Gases Co., Ltd

    Contact Person: Millet

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