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Chengdu Taiyu Industrial Gases Co., Ltd

Electronic Gases Nitrogen Trifluoride NF3 Gas

    • Electronic Gases Nitrogen Trifluoride NF3 Gas
    • Electronic Gases Nitrogen Trifluoride NF3 Gas
  • Electronic Gases Nitrogen Trifluoride NF3 Gas

    Product Details:

    Place of Origin: China
    Brand Name: TYHJ
    Certification: ISO Certificate
    Model Number: electronic gas NF3

    Payment & Shipping Terms:

    Minimum Order Quantity: 200pcs
    Price: negotiable
    Packaging Details: 1. 44Ltr Cylinder filling with 20Kg NF3 Liquid. 2. 440L cylinder filling with 200Kg NF3 Liquid.
    Delivery Time: 15-30 working days after receipt of deposit
    Payment Terms: T/T, L/C, D/A, D/P, Western Union
    Supply Ability: 10000KG per month
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    Detailed Product Description
    CAS No.: 7783-54-2 EINECS No.: 232-007-1
    UN No.: UN2451 Purity: 99.995%
    Dot Class: 2.2 Appearance: Colorless

     

    Electronic Gases Nitrogen Trifluoride NF3 Gas

     

     

    Nitrogen trifluoride is the inorganic compound with the formula NF3. This nitrogen-fluorine compound is a colorless, odorless, nonflammable gas. It finds increasing use as an etchant in microelectronics. Nitrogen trifluoride is an extremely strong greenhouse gas.

     

     

    Specifications

     

    CAS No.: 7783-54-2

    EINECS No.: 232-007-1

    UN No.: UN2451

    Purity: 99.995%

    Dot Class: 2.2

    Appearance: Colorless

    Grade Standard: Electron Grade

    Specification

    ≥99.995%

    CF4

    ≤40 ppm

    N2

    ≤5 ppm

    O2+Ar

    ≤5 ppm

    CO

    ≤5 ppm

    CO2

    /

    N2O

    /

    SF6

    ≤2 ppm

    H2O

    ≤1 ppm

    HF

    ≤1 ppm

     

     

    Typical Application

     

    Etching:

     

    Nitrogen Trifluoride is used in the plasma etching of silicon wafers.

    Electronic Gases Nitrogen Trifluoride NF3 Gas NF3


     

    Packaging & Shipping

     

     

    Package Size

    44Ltr Cylinder

    440Ltr Cylinder

    ISO Tank

    Filling Net Weight/Cyl

    20Kgs

    200Kgs

    /

    QTY Loaded in 20’Container

    200 Cyls

    20 Cyls

    Total Net Weight

    4 Tons

    4 Tons

    Cylinder Tare Weight

    50Kgs

    240Kgs

    Valve

    CGA/DISS640

     
     
    Nitrogen Trifluoride(NF3)_MSDS.pdf

    Contact Details
    Chengdu Taiyu Industrial Gases Co., Ltd

    Contact Person: Millet

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    Chengdu Taiyu Industrial Gases Co., Ltd
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